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Optical interferometry on lateral porous silicon

Abstract : We demonstrate the transducing ability of lateral porous silicon membranes (LPSi) using optical interferometry. To this aim, we use a Fourier Transform Infra-Red spectrometer (FTIR) coupled to a microscope stage equipped with an appropriate objective in order to overcome the difficulty to obtain interference signal from the LPSi membrane with small dimensions. We have recorded reflectance spectra upon filling the membrane with various solvents and the observed shifts of Fabry-Pérot fringe patterns indicate that the we are able to differentiate between solvents, thus providing a proof-of-concept of the LPSi interferometric transducer.
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Contributor : Thierry Leichle <>
Submitted on : Saturday, May 1, 2021 - 12:30:58 AM
Last modification on : Wednesday, June 9, 2021 - 10:00:33 AM


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  • HAL Id : hal-03212768, version 2


Yingning He, Douglas Silva de Vasconcellos, Véronique Bardinal, David Bourrier, Éric Imbernon, et al.. Optical interferometry on lateral porous silicon. Porous Semiconductors Science and Technology (PSST) Conference, Mar 2018, La Grande Motte, France. ⟨hal-03212768v2⟩



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