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Lateral Porous Silicon Interferometric Transducer for Sensing Applications

Yingning He 1 Douglas Silva de Vasconcellos 1 Véronique Bardinal 2 David Bourrier 3 Éric Imbernon 3 Ludovic Salvagnac 3 Adrian Laborde 3 Xavier Dollat 4 Thierry Leichle 1
1 LAAS-MEMS - Équipe Microsystèmes électromécaniques
LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
3 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
4 LAAS-I2C - Service Instrumentation Conception Caractérisation
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : In this work, we demonstrate the transducing ability of lateral porous silicon membranes (LPSi) using optical interferometry. To this aim, we carry out Fourier-transform infrared spectroscopy measurements using a microscope equipped with an appropriate objective in order to overcome the difficulty to obtain interference signal from LPSi membranes with small dimensions. Reflectance spectra are recorded while filling the membrane with various solvents and their analysis provide estimations of the effective optical thicknesses and the resulting index of refraction of the fillers in the NIR range. The results show that the various solvents can appropriately be identified and discriminated through the derived refractive indices, thus providing a proof-of-concept of the LPSi interferometric transducer.
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https://hal.archives-ouvertes.fr/hal-03212723
Contributor : Thierry Leichle <>
Submitted on : Thursday, April 29, 2021 - 9:22:48 PM
Last modification on : Wednesday, June 9, 2021 - 10:00:33 AM

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Yingning He, Douglas Silva de Vasconcellos, Véronique Bardinal, David Bourrier, Éric Imbernon, et al.. Lateral Porous Silicon Interferometric Transducer for Sensing Applications. 2018 IEEE SENSORS, Oct 2018, New Delhi, India. ⟨10.1109/ICSENS.2018.8589773⟩. ⟨hal-03212723⟩

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