Skip to Main content Skip to Navigation
Conference papers

Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators

Résumé : In this work, we demonstrate the integration of piezoelectric actuation means on arrays of nanocantilevers at the wafer scale. We use lead titanate zirconate (PZT) as piezoelectric material mainly because of its excellent actuation properties even when geometrically constrained at extreme scale
Complete list of metadata

https://hal.archives-ouvertes.fr/hal-03165172
Contributor : Compte de Service Administrateur Ensam <>
Submitted on : Wednesday, March 10, 2021 - 2:32:53 PM
Last modification on : Wednesday, June 9, 2021 - 10:00:24 AM
Long-term archiving on: : Friday, June 11, 2021 - 6:54:34 PM

File

LSIS_NMC_2013_THOMAS.pdf
Files produced by the author(s)

Identifiers

  • HAL Id : hal-03165172, version 1

Citation

Denis Dezest, Fabrice Mathieu, Laurent Mazenq, Caroline Soyer, Jean Costecalde, et al.. Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators. 2013 Nanomechanical Sensing Workshop, May 2013, Stanford, USA, United States. pp.0. ⟨hal-03165172⟩

Share